Description

The ABB 087147-002 is a specialized electrometer smart sensor designed for the ultra-precise measurement of electrostatic charge, voltage, and current in demanding industrial environments. As part of ABB’s advanced sensing portfolio, the 087147-002 combines high-input impedance electronics with intelligent signal processing to detect minute static potentials that could otherwise damage sensitive components or disrupt production processes. This “smart” module often features onboard diagnostics, digital communication capabilities, and self-calibration routines, making it a critical asset for industries where electrostatic discharge (ESD) control is paramount, such as semiconductor fabrication, pharmaceutical packaging, and precision optics manufacturing.

Application Scenarios

In a state-of-the-art semiconductor fab in Taiwan, microscopic dust particles attracted by static charges on silicon wafers were causing a 12% yield loss during the lithography process. Traditional passive ionizers were insufficient to monitor the rapidly changing charge levels. The engineering team installed the ABB 087147-002 electrometer sensors at key transfer points. The 087147-002 provided real-time, high-resolution feedback on wafer surface potential, allowing the facility’s central control system to dynamically adjust ionizer output millisecond-by-millisecond. Within three months, particle-related defects dropped by 95%, saving the factory millions in recovered yield. The 087147-002’s ability to operate reliably in the cleanroom’s strict environmental conditions while delivering lab-grade accuracy proved it to be the cornerstone of their new ESD mitigation strategy.