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OEM-Quality Replacement: LAM 810-102361-222 RF Match for LAM Research Tools
Description: The LAM 810-102361-222 is a high-performance,automatic RF impedance matching network designed by Lam Research for use in advanced plasma etch and deposition systems—particularly within the Kiyo®and Flex®family of semiconductor wafer processing tools.This critical subsystem ensures maximum power transfer from the RF generator(typically 2 MHz,13.56 MHz,or 60 MHz)to the plasma chamber by dynamically adjusting variable…